4/2/2010	12:11:27 AM	H2 valve closed
4/2/2010	12:11:27 AM	BCl3 valve closed
4/2/2010	12:11:27 AM	PH3 valve closed
4/2/2010	12:11:27 AM	SiCl4 pre valve closed
4/2/2010	12:11:27 AM	SiCl4 post valve closed
4/2/2010	12:11:27 AM	Main Vac valve closed
4/2/2010	12:11:27 AM	Bypass valve closed
4/2/2010	12:11:27 AM	Helium valve opened
4/2/2010	12:11:27 AM	Bubbler valve opened
4/2/2010	12:11:27 AM	Helium MFC set to  500.000000
4/2/2010	12:11:27 AM	H2 MFC set to  0.000000
4/2/2010	12:11:27 AM	BCl3 MFC set to  0.000000
4/2/2010	12:11:27 AM	SiCl4 MFC set to  0.000000
4/2/2010	12:11:27 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	12:11:27 AM	Tube furnace set to 0
4/2/2010	12:12:57 AM	Run aborted at 12:12 AM
4/2/2010	12:12:57 AM	Helium valve closed
4/2/2010	12:12:57 AM	H2 valve closed
4/2/2010	12:12:57 AM	BCl3 valve closed
4/2/2010	12:12:57 AM	PH3 valve closed
4/2/2010	12:12:57 AM	SiCl4 pre valve closed
4/2/2010	12:12:57 AM	SiCl4 post valve closed
4/2/2010	12:12:57 AM	Bypass valve closed
4/2/2010	12:12:57 AM	Main Vac valve closed
4/2/2010	12:12:57 AM	Bubbler valve closed
4/2/2010	12:12:57 AM	Helium MFC set to  0.000000
4/2/2010	12:12:57 AM	H2 MFC set to  0.000000
4/2/2010	12:12:57 AM	BCl3 MFC set to  0.000000
4/2/2010	12:12:57 AM	SiCl4 MFC set to  0.000000
4/2/2010	12:12:57 AM	Tube furnace set to 0
4/2/2010	12:14:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	12:14:59 AM	Recipe started at 12:14 AM
4/2/2010	12:14:59 AM	Helium valve closed
4/2/2010	12:14:59 AM	H2 valve closed
4/2/2010	12:14:59 AM	BCl3 valve closed
4/2/2010	12:14:59 AM	PH3 valve closed
4/2/2010	12:14:59 AM	SiCl4 pre valve closed
4/2/2010	12:14:59 AM	SiCl4 post valve closed
4/2/2010	12:14:59 AM	Main Vac valve closed
4/2/2010	12:14:59 AM	Bubbler valve closed
4/2/2010	12:14:59 AM	Bypass valve opened
4/2/2010	12:14:59 AM	Helium MFC set to  0.000000
4/2/2010	12:14:59 AM	H2 MFC set to  0.000000
4/2/2010	12:14:59 AM	BCl3 MFC set to  0.000000
4/2/2010	12:14:59 AM	SiCl4 MFC set to  0.000000
4/2/2010	12:14:59 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	12:15:00 AM	Tube furnace set to 0
4/2/2010	12:15:28 AM	Helium valve closed
4/2/2010	12:15:28 AM	H2 valve closed
4/2/2010	12:15:28 AM	BCl3 valve closed
4/2/2010	12:15:28 AM	PH3 valve closed
4/2/2010	12:15:28 AM	SiCl4 pre valve closed
4/2/2010	12:15:28 AM	SiCl4 post valve closed
4/2/2010	12:15:28 AM	Bubbler valve closed
4/2/2010	12:15:28 AM	Main Vac valve opened
4/2/2010	12:15:28 AM	Bypass valve opened
4/2/2010	12:15:28 AM	Helium MFC set to  0.000000
4/2/2010	12:15:28 AM	H2 MFC set to  0.000000
4/2/2010	12:15:28 AM	BCl3 MFC set to  0.000000
4/2/2010	12:15:28 AM	SiCl4 MFC set to  0.000000
4/2/2010	12:15:28 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	12:15:28 AM	Tube furnace set to 0
4/2/2010	12:15:28 AM	Run finished at 12:15 AM
4/2/2010	12:15:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	9:51:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	9:51:22 AM	Recipe started at 9:51 AM
4/2/2010	9:51:22 AM	H2 valve closed
4/2/2010	9:51:22 AM	BCl3 valve closed
4/2/2010	9:51:22 AM	PH3 valve closed
4/2/2010	9:51:22 AM	SiCl4 pre valve closed
4/2/2010	9:51:22 AM	SiCl4 post valve closed
4/2/2010	9:51:22 AM	Main Vac valve closed
4/2/2010	9:51:22 AM	Bypass valve closed
4/2/2010	9:51:22 AM	Bubbler valve closed
4/2/2010	9:51:22 AM	Helium valve opened
4/2/2010	9:51:22 AM	Helium MFC set to  500.000000
4/2/2010	9:51:22 AM	H2 MFC set to  0.000000
4/2/2010	9:51:22 AM	BCl3 MFC set to  0.000000
4/2/2010	9:51:22 AM	SiCl4 MFC set to  0.000000
4/2/2010	9:51:22 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	9:51:22 AM	Tube furnace set to 0
4/2/2010	9:52:17 AM	Helium valve closed
4/2/2010	9:52:17 AM	H2 valve closed
4/2/2010	9:52:17 AM	BCl3 valve closed
4/2/2010	9:52:17 AM	PH3 valve closed
4/2/2010	9:52:17 AM	SiCl4 pre valve closed
4/2/2010	9:52:17 AM	SiCl4 post valve closed
4/2/2010	9:52:17 AM	Main Vac valve closed
4/2/2010	9:52:17 AM	Bypass valve closed
4/2/2010	9:52:17 AM	Bubbler valve closed
4/2/2010	9:52:17 AM	Helium MFC set to  0.000000
4/2/2010	9:52:17 AM	H2 MFC set to  0.000000
4/2/2010	9:52:17 AM	BCl3 MFC set to  0.000000
4/2/2010	9:52:17 AM	SiCl4 MFC set to  0.000000
4/2/2010	9:52:17 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	9:52:17 AM	Tube furnace set to 0
4/2/2010	9:52:17 AM	Run finished at 9:52 AM
4/2/2010	9:52:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	9:58:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/2/2010	9:58:20 AM	Recipe started at 9:58 AM
4/2/2010	9:58:20 AM	H2 valve closed
4/2/2010	9:58:20 AM	BCl3 valve closed
4/2/2010	9:58:20 AM	PH3 valve closed
4/2/2010	9:58:20 AM	SiCl4 pre valve closed
4/2/2010	9:58:20 AM	SiCl4 post valve closed
4/2/2010	9:58:20 AM	Main Vac valve closed
4/2/2010	9:58:20 AM	Bypass valve closed
4/2/2010	9:58:20 AM	Bubbler valve closed
4/2/2010	9:58:20 AM	Helium valve opened
4/2/2010	9:58:20 AM	Helium MFC set to  500.000000
4/2/2010	9:58:20 AM	H2 MFC set to  0.000000
4/2/2010	9:58:20 AM	BCl3 MFC set to  0.000000
4/2/2010	9:58:20 AM	SiCl4 MFC set to  0.000000
4/2/2010	9:58:20 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	9:58:20 AM	Tube furnace set to 0
4/2/2010	9:58:22 AM	Helium valve closed
4/2/2010	9:58:22 AM	H2 valve closed
4/2/2010	9:58:22 AM	BCl3 valve closed
4/2/2010	9:58:22 AM	PH3 valve closed
4/2/2010	9:58:22 AM	SiCl4 pre valve closed
4/2/2010	9:58:22 AM	SiCl4 post valve closed
4/2/2010	9:58:22 AM	Main Vac valve closed
4/2/2010	9:58:22 AM	Bypass valve closed
4/2/2010	9:58:22 AM	Bubbler valve closed
4/2/2010	9:58:22 AM	Helium MFC set to  0.000000
4/2/2010	9:58:22 AM	H2 MFC set to  0.000000
4/2/2010	9:58:22 AM	BCl3 MFC set to  0.000000
4/2/2010	9:58:22 AM	SiCl4 MFC set to  0.000000
4/2/2010	9:58:22 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	9:58:22 AM	Tube furnace set to 0
4/2/2010	9:58:37 AM	Helium valve closed
4/2/2010	9:58:37 AM	H2 valve closed
4/2/2010	9:58:37 AM	BCl3 valve closed
4/2/2010	9:58:37 AM	PH3 valve closed
4/2/2010	9:58:37 AM	SiCl4 pre valve closed
4/2/2010	9:58:37 AM	SiCl4 post valve closed
4/2/2010	9:58:37 AM	Main Vac valve closed
4/2/2010	9:58:37 AM	Bubbler valve closed
4/2/2010	9:58:37 AM	Bypass valve opened
4/2/2010	9:58:37 AM	Helium MFC set to  0.000000
4/2/2010	9:58:37 AM	H2 MFC set to  0.000000
4/2/2010	9:58:37 AM	BCl3 MFC set to  0.000000
4/2/2010	9:58:37 AM	SiCl4 MFC set to  0.000000
4/2/2010	9:58:37 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	9:58:37 AM	Tube furnace set to 0
4/2/2010	9:59:09 AM	Helium valve closed
4/2/2010	9:59:09 AM	H2 valve closed
4/2/2010	9:59:09 AM	BCl3 valve closed
4/2/2010	9:59:09 AM	PH3 valve closed
4/2/2010	9:59:09 AM	SiCl4 pre valve closed
4/2/2010	9:59:09 AM	SiCl4 post valve closed
4/2/2010	9:59:09 AM	Bubbler valve closed
4/2/2010	9:59:09 AM	Main Vac valve opened
4/2/2010	9:59:09 AM	Bypass valve opened
4/2/2010	9:59:09 AM	Helium MFC set to  0.000000
4/2/2010	9:59:09 AM	H2 MFC set to  0.000000
4/2/2010	9:59:09 AM	BCl3 MFC set to  0.000000
4/2/2010	9:59:09 AM	SiCl4 MFC set to  0.000000
4/2/2010	9:59:09 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	9:59:09 AM	Tube furnace set to 0
4/2/2010	10:04:09 AM	H2 valve closed
4/2/2010	10:04:09 AM	BCl3 valve closed
4/2/2010	10:04:09 AM	PH3 valve closed
4/2/2010	10:04:09 AM	SiCl4 pre valve closed
4/2/2010	10:04:09 AM	SiCl4 post valve closed
4/2/2010	10:04:09 AM	Main Vac valve closed
4/2/2010	10:04:09 AM	Bypass valve closed
4/2/2010	10:04:09 AM	Bubbler valve closed
4/2/2010	10:04:09 AM	Helium valve opened
4/2/2010	10:04:09 AM	Helium MFC set to  500.000000
4/2/2010	10:04:09 AM	H2 MFC set to  0.000000
4/2/2010	10:04:09 AM	BCl3 MFC set to  0.000000
4/2/2010	10:04:09 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:04:09 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:04:09 AM	Tube furnace set to 0
4/2/2010	10:05:30 AM	Helium valve closed
4/2/2010	10:05:30 AM	H2 valve closed
4/2/2010	10:05:30 AM	BCl3 valve closed
4/2/2010	10:05:30 AM	PH3 valve closed
4/2/2010	10:05:30 AM	SiCl4 pre valve closed
4/2/2010	10:05:30 AM	SiCl4 post valve closed
4/2/2010	10:05:30 AM	Main Vac valve closed
4/2/2010	10:05:30 AM	Bypass valve closed
4/2/2010	10:05:30 AM	Bubbler valve closed
4/2/2010	10:05:30 AM	Helium MFC set to  0.000000
4/2/2010	10:05:30 AM	H2 MFC set to  0.000000
4/2/2010	10:05:30 AM	BCl3 MFC set to  0.000000
4/2/2010	10:05:30 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:05:30 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:05:30 AM	Tube furnace set to 0
4/2/2010	10:05:45 AM	Helium valve closed
4/2/2010	10:05:45 AM	H2 valve closed
4/2/2010	10:05:45 AM	BCl3 valve closed
4/2/2010	10:05:45 AM	PH3 valve closed
4/2/2010	10:05:45 AM	SiCl4 pre valve closed
4/2/2010	10:05:45 AM	SiCl4 post valve closed
4/2/2010	10:05:45 AM	Main Vac valve closed
4/2/2010	10:05:45 AM	Bubbler valve closed
4/2/2010	10:05:45 AM	Bypass valve opened
4/2/2010	10:05:45 AM	Helium MFC set to  0.000000
4/2/2010	10:05:45 AM	H2 MFC set to  0.000000
4/2/2010	10:05:45 AM	BCl3 MFC set to  0.000000
4/2/2010	10:05:45 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:05:45 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:05:45 AM	Tube furnace set to 0
4/2/2010	10:06:07 AM	Helium valve closed
4/2/2010	10:06:07 AM	H2 valve closed
4/2/2010	10:06:07 AM	BCl3 valve closed
4/2/2010	10:06:07 AM	PH3 valve closed
4/2/2010	10:06:07 AM	SiCl4 pre valve closed
4/2/2010	10:06:07 AM	SiCl4 post valve closed
4/2/2010	10:06:07 AM	Bubbler valve closed
4/2/2010	10:06:07 AM	Main Vac valve opened
4/2/2010	10:06:07 AM	Bypass valve opened
4/2/2010	10:06:07 AM	Helium MFC set to  0.000000
4/2/2010	10:06:07 AM	H2 MFC set to  0.000000
4/2/2010	10:06:07 AM	BCl3 MFC set to  0.000000
4/2/2010	10:06:07 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:06:07 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:06:07 AM	Tube furnace set to 0
4/2/2010	10:11:07 AM	H2 valve closed
4/2/2010	10:11:07 AM	BCl3 valve closed
4/2/2010	10:11:07 AM	PH3 valve closed
4/2/2010	10:11:07 AM	SiCl4 pre valve closed
4/2/2010	10:11:07 AM	SiCl4 post valve closed
4/2/2010	10:11:07 AM	Main Vac valve closed
4/2/2010	10:11:07 AM	Bypass valve closed
4/2/2010	10:11:07 AM	Bubbler valve closed
4/2/2010	10:11:07 AM	Helium valve opened
4/2/2010	10:11:07 AM	Helium MFC set to  500.000000
4/2/2010	10:11:07 AM	H2 MFC set to  0.000000
4/2/2010	10:11:07 AM	BCl3 MFC set to  0.000000
4/2/2010	10:11:07 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:11:07 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:11:07 AM	Tube furnace set to 0
4/2/2010	10:12:27 AM	Helium valve closed
4/2/2010	10:12:27 AM	H2 valve closed
4/2/2010	10:12:27 AM	BCl3 valve closed
4/2/2010	10:12:27 AM	PH3 valve closed
4/2/2010	10:12:27 AM	SiCl4 pre valve closed
4/2/2010	10:12:27 AM	SiCl4 post valve closed
4/2/2010	10:12:27 AM	Main Vac valve closed
4/2/2010	10:12:27 AM	Bypass valve closed
4/2/2010	10:12:27 AM	Bubbler valve closed
4/2/2010	10:12:27 AM	Helium MFC set to  0.000000
4/2/2010	10:12:27 AM	H2 MFC set to  0.000000
4/2/2010	10:12:27 AM	BCl3 MFC set to  0.000000
4/2/2010	10:12:27 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:12:27 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:12:28 AM	Tube furnace set to 0
4/2/2010	10:12:43 AM	Helium valve closed
4/2/2010	10:12:43 AM	H2 valve closed
4/2/2010	10:12:43 AM	BCl3 valve closed
4/2/2010	10:12:43 AM	PH3 valve closed
4/2/2010	10:12:43 AM	SiCl4 pre valve closed
4/2/2010	10:12:43 AM	SiCl4 post valve closed
4/2/2010	10:12:43 AM	Main Vac valve closed
4/2/2010	10:12:43 AM	Bubbler valve closed
4/2/2010	10:12:43 AM	Bypass valve opened
4/2/2010	10:12:43 AM	Helium MFC set to  0.000000
4/2/2010	10:12:43 AM	H2 MFC set to  0.000000
4/2/2010	10:12:43 AM	BCl3 MFC set to  0.000000
4/2/2010	10:12:43 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:12:43 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:12:43 AM	Tube furnace set to 0
4/2/2010	10:13:04 AM	Helium valve closed
4/2/2010	10:13:04 AM	H2 valve closed
4/2/2010	10:13:04 AM	BCl3 valve closed
4/2/2010	10:13:04 AM	PH3 valve closed
4/2/2010	10:13:04 AM	SiCl4 pre valve closed
4/2/2010	10:13:04 AM	SiCl4 post valve closed
4/2/2010	10:13:04 AM	Bubbler valve closed
4/2/2010	10:13:04 AM	Main Vac valve opened
4/2/2010	10:13:04 AM	Bypass valve opened
4/2/2010	10:13:04 AM	Helium MFC set to  0.000000
4/2/2010	10:13:04 AM	H2 MFC set to  0.000000
4/2/2010	10:13:04 AM	BCl3 MFC set to  0.000000
4/2/2010	10:13:04 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:13:04 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:13:04 AM	Tube furnace set to 0
4/2/2010	10:14:20 AM	Run aborted at 10:14 AM
4/2/2010	10:14:20 AM	Helium valve closed
4/2/2010	10:14:20 AM	H2 valve closed
4/2/2010	10:14:20 AM	BCl3 valve closed
4/2/2010	10:14:20 AM	PH3 valve closed
4/2/2010	10:14:20 AM	SiCl4 pre valve closed
4/2/2010	10:14:20 AM	SiCl4 post valve closed
4/2/2010	10:14:20 AM	Bypass valve closed
4/2/2010	10:14:20 AM	Main Vac valve closed
4/2/2010	10:14:20 AM	Bubbler valve closed
4/2/2010	10:14:20 AM	Helium MFC set to  0.000000
4/2/2010	10:14:20 AM	H2 MFC set to  0.000000
4/2/2010	10:14:20 AM	BCl3 MFC set to  0.000000
4/2/2010	10:14:20 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:14:21 AM	Tube furnace set to 0
4/2/2010	10:14:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/2/2010	10:14:23 AM	Bypass valve closed
4/2/2010	10:14:26 AM	Bypass valve opened
4/2/2010	10:14:27 AM	Main Vac valve closed
4/2/2010	10:14:28 AM	Main Vac valve opened
4/2/2010	10:15:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/2/2010	10:15:31 AM	Recipe started at 10:15 AM
4/2/2010	10:15:31 AM	H2 valve closed
4/2/2010	10:15:31 AM	BCl3 valve closed
4/2/2010	10:15:31 AM	PH3 valve closed
4/2/2010	10:15:31 AM	SiCl4 pre valve closed
4/2/2010	10:15:31 AM	SiCl4 post valve closed
4/2/2010	10:15:31 AM	Main Vac valve closed
4/2/2010	10:15:31 AM	Bypass valve closed
4/2/2010	10:15:31 AM	Bubbler valve closed
4/2/2010	10:15:31 AM	Helium valve opened
4/2/2010	10:15:31 AM	Helium MFC set to  500.000000
4/2/2010	10:15:31 AM	H2 MFC set to  0.000000
4/2/2010	10:15:31 AM	BCl3 MFC set to  0.000000
4/2/2010	10:15:31 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:15:31 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:15:31 AM	Tube furnace set to 0
4/2/2010	10:16:52 AM	Helium valve closed
4/2/2010	10:16:52 AM	H2 valve closed
4/2/2010	10:16:52 AM	BCl3 valve closed
4/2/2010	10:16:52 AM	PH3 valve closed
4/2/2010	10:16:52 AM	SiCl4 pre valve closed
4/2/2010	10:16:52 AM	SiCl4 post valve closed
4/2/2010	10:16:52 AM	Main Vac valve closed
4/2/2010	10:16:52 AM	Bypass valve closed
4/2/2010	10:16:52 AM	Bubbler valve closed
4/2/2010	10:16:52 AM	Helium MFC set to  0.000000
4/2/2010	10:16:52 AM	H2 MFC set to  0.000000
4/2/2010	10:16:52 AM	BCl3 MFC set to  0.000000
4/2/2010	10:16:52 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:16:52 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:16:52 AM	Tube furnace set to 0
4/2/2010	10:17:07 AM	Helium valve closed
4/2/2010	10:17:07 AM	H2 valve closed
4/2/2010	10:17:07 AM	BCl3 valve closed
4/2/2010	10:17:07 AM	PH3 valve closed
4/2/2010	10:17:07 AM	SiCl4 pre valve closed
4/2/2010	10:17:07 AM	SiCl4 post valve closed
4/2/2010	10:17:07 AM	Main Vac valve closed
4/2/2010	10:17:07 AM	Bubbler valve closed
4/2/2010	10:17:07 AM	Bypass valve opened
4/2/2010	10:17:07 AM	Helium MFC set to  0.000000
4/2/2010	10:17:07 AM	H2 MFC set to  0.000000
4/2/2010	10:17:07 AM	BCl3 MFC set to  0.000000
4/2/2010	10:17:07 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:17:07 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:17:07 AM	Tube furnace set to 0
4/2/2010	10:17:28 AM	Helium valve closed
4/2/2010	10:17:28 AM	H2 valve closed
4/2/2010	10:17:28 AM	BCl3 valve closed
4/2/2010	10:17:28 AM	PH3 valve closed
4/2/2010	10:17:28 AM	SiCl4 pre valve closed
4/2/2010	10:17:28 AM	SiCl4 post valve closed
4/2/2010	10:17:28 AM	Bubbler valve closed
4/2/2010	10:17:28 AM	Main Vac valve opened
4/2/2010	10:17:29 AM	Bypass valve opened
4/2/2010	10:17:29 AM	Helium MFC set to  0.000000
4/2/2010	10:17:29 AM	H2 MFC set to  0.000000
4/2/2010	10:17:29 AM	BCl3 MFC set to  0.000000
4/2/2010	10:17:29 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:17:29 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:17:29 AM	Tube furnace set to 0
4/2/2010	10:22:29 AM	H2 valve closed
4/2/2010	10:22:29 AM	BCl3 valve closed
4/2/2010	10:22:29 AM	PH3 valve closed
4/2/2010	10:22:29 AM	SiCl4 pre valve closed
4/2/2010	10:22:29 AM	SiCl4 post valve closed
4/2/2010	10:22:29 AM	Main Vac valve closed
4/2/2010	10:22:29 AM	Bypass valve closed
4/2/2010	10:22:29 AM	Bubbler valve closed
4/2/2010	10:22:29 AM	Helium valve opened
4/2/2010	10:22:29 AM	Helium MFC set to  500.000000
4/2/2010	10:22:29 AM	H2 MFC set to  0.000000
4/2/2010	10:22:29 AM	BCl3 MFC set to  0.000000
4/2/2010	10:22:29 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:22:29 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:22:29 AM	Tube furnace set to 0
4/2/2010	10:23:02 AM	Run aborted at 10:23 AM
4/2/2010	10:23:02 AM	Helium valve closed
4/2/2010	10:23:02 AM	H2 valve closed
4/2/2010	10:23:02 AM	BCl3 valve closed
4/2/2010	10:23:02 AM	PH3 valve closed
4/2/2010	10:23:02 AM	SiCl4 pre valve closed
4/2/2010	10:23:02 AM	SiCl4 post valve closed
4/2/2010	10:23:02 AM	Bypass valve closed
4/2/2010	10:23:02 AM	Main Vac valve closed
4/2/2010	10:23:02 AM	Bubbler valve closed
4/2/2010	10:23:02 AM	Helium MFC set to  0.000000
4/2/2010	10:23:02 AM	H2 MFC set to  0.000000
4/2/2010	10:23:02 AM	BCl3 MFC set to  0.000000
4/2/2010	10:23:02 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:23:02 AM	Tube furnace set to 0
4/2/2010	10:23:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/2/2010	10:23:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	10:23:11 AM	Recipe started at 10:23 AM
4/2/2010	10:23:11 AM	Helium valve closed
4/2/2010	10:23:11 AM	H2 valve closed
4/2/2010	10:23:11 AM	BCl3 valve closed
4/2/2010	10:23:11 AM	PH3 valve closed
4/2/2010	10:23:11 AM	SiCl4 pre valve closed
4/2/2010	10:23:11 AM	SiCl4 post valve closed
4/2/2010	10:23:11 AM	Main Vac valve closed
4/2/2010	10:23:11 AM	Bubbler valve closed
4/2/2010	10:23:11 AM	Bypass valve opened
4/2/2010	10:23:11 AM	Helium MFC set to  0.000000
4/2/2010	10:23:11 AM	H2 MFC set to  0.000000
4/2/2010	10:23:11 AM	BCl3 MFC set to  0.000000
4/2/2010	10:23:11 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:23:11 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:23:11 AM	Tube furnace set to 0
4/2/2010	10:23:28 AM	Helium valve closed
4/2/2010	10:23:28 AM	H2 valve closed
4/2/2010	10:23:28 AM	BCl3 valve closed
4/2/2010	10:23:28 AM	PH3 valve closed
4/2/2010	10:23:28 AM	SiCl4 pre valve closed
4/2/2010	10:23:28 AM	SiCl4 post valve closed
4/2/2010	10:23:28 AM	Bubbler valve closed
4/2/2010	10:23:28 AM	Main Vac valve opened
4/2/2010	10:23:28 AM	Bypass valve opened
4/2/2010	10:23:28 AM	Helium MFC set to  0.000000
4/2/2010	10:23:28 AM	H2 MFC set to  0.000000
4/2/2010	10:23:28 AM	BCl3 MFC set to  0.000000
4/2/2010	10:23:28 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:23:28 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:23:28 AM	Tube furnace set to 0
4/2/2010	10:23:28 AM	Run finished at 10:23 AM
4/2/2010	10:23:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	10:24:06 AM	Bypass valve closed
4/2/2010	10:24:06 AM	Main Vac valve closed
4/2/2010	10:24:21 AM	Bypass valve opened
4/2/2010	10:24:22 AM	Main Vac valve opened
4/2/2010	10:27:33 AM	Recipe started at 10:27 AM
4/2/2010	10:27:33 AM	Helium valve closed
4/2/2010	10:27:33 AM	BCl3 valve closed
4/2/2010	10:27:33 AM	PH3 valve closed
4/2/2010	10:27:33 AM	SiCl4 pre valve closed
4/2/2010	10:27:33 AM	SiCl4 post valve closed
4/2/2010	10:27:33 AM	Main Vac valve closed
4/2/2010	10:27:33 AM	Bypass valve closed
4/2/2010	10:27:33 AM	Bubbler valve closed
4/2/2010	10:27:33 AM	H2 valve opened
4/2/2010	10:27:33 AM	Helium MFC set to  0.000000
4/2/2010	10:27:33 AM	H2 MFC set to  500.000000
4/2/2010	10:27:33 AM	BCl3 MFC set to  0.000000
4/2/2010	10:27:33 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:27:33 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:27:33 AM	Tube furnace set to 1000
4/2/2010	10:28:52 AM	Helium valve closed
4/2/2010	10:28:52 AM	BCl3 valve closed
4/2/2010	10:28:52 AM	PH3 valve closed
4/2/2010	10:28:52 AM	SiCl4 pre valve closed
4/2/2010	10:28:52 AM	SiCl4 post valve closed
4/2/2010	10:28:52 AM	Main Vac valve closed
4/2/2010	10:28:52 AM	Bypass valve closed
4/2/2010	10:28:52 AM	H2 valve opened
4/2/2010	10:28:52 AM	Bubbler valve opened
4/2/2010	10:28:52 AM	Helium MFC set to  0.000000
4/2/2010	10:28:53 AM	H2 MFC set to  500.000000
4/2/2010	10:28:53 AM	BCl3 MFC set to  0.000000
4/2/2010	10:28:53 AM	SiCl4 MFC set to  0.000000
4/2/2010	10:28:53 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:28:53 AM	Tube furnace set to 1000
4/2/2010	10:48:53 AM	Helium valve closed
4/2/2010	10:48:53 AM	PH3 valve closed
4/2/2010	10:48:53 AM	Main Vac valve closed
4/2/2010	10:48:53 AM	Bypass valve closed
4/2/2010	10:48:53 AM	H2 valve opened
4/2/2010	10:48:53 AM	BCl3 valve opened
4/2/2010	10:48:53 AM	SiCl4 pre valve opened
4/2/2010	10:48:53 AM	SiCl4 post valve opened
4/2/2010	10:48:53 AM	Bubbler valve opened
4/2/2010	10:48:53 AM	Helium MFC set to  0.000000
4/2/2010	10:48:53 AM	H2 MFC set to  500.000000
4/2/2010	10:48:53 AM	BCl3 MFC set to  35.000000
4/2/2010	10:48:53 AM	SiCl4 MFC set to  325.000000
4/2/2010	10:48:53 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	10:48:53 AM	Tube furnace set to 1000
4/2/2010	11:03:53 AM	Helium valve closed
4/2/2010	11:03:53 AM	BCl3 valve closed
4/2/2010	11:03:53 AM	PH3 valve closed
4/2/2010	11:03:53 AM	SiCl4 pre valve closed
4/2/2010	11:03:53 AM	SiCl4 post valve closed
4/2/2010	11:03:53 AM	Main Vac valve closed
4/2/2010	11:03:53 AM	Bypass valve closed
4/2/2010	11:03:53 AM	H2 valve opened
4/2/2010	11:03:53 AM	Bubbler valve opened
4/2/2010	11:03:53 AM	Helium MFC set to  0.000000
4/2/2010	11:03:53 AM	H2 MFC set to  500.000000
4/2/2010	11:03:53 AM	BCl3 MFC set to  0.000000
4/2/2010	11:03:53 AM	SiCl4 MFC set to  0.000000
4/2/2010	11:03:53 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	11:03:53 AM	Tube furnace set to 750
4/2/2010	11:23:53 AM	H2 valve closed
4/2/2010	11:23:53 AM	BCl3 valve closed
4/2/2010	11:23:53 AM	PH3 valve closed
4/2/2010	11:23:53 AM	SiCl4 pre valve closed
4/2/2010	11:23:53 AM	SiCl4 post valve closed
4/2/2010	11:23:53 AM	Main Vac valve closed
4/2/2010	11:23:53 AM	Bypass valve closed
4/2/2010	11:23:53 AM	Helium valve opened
4/2/2010	11:23:53 AM	Bubbler valve opened
4/2/2010	11:23:53 AM	Helium MFC set to  500.000000
4/2/2010	11:23:53 AM	H2 MFC set to  0.000000
4/2/2010	11:23:53 AM	BCl3 MFC set to  0.000000
4/2/2010	11:23:53 AM	SiCl4 MFC set to  0.000000
4/2/2010	11:23:53 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	11:23:53 AM	Tube furnace set to 0
4/2/2010	11:43:53 AM	Helium valve closed
4/2/2010	11:43:53 AM	H2 valve closed
4/2/2010	11:43:53 AM	BCl3 valve closed
4/2/2010	11:43:53 AM	PH3 valve closed
4/2/2010	11:43:53 AM	SiCl4 pre valve closed
4/2/2010	11:43:53 AM	SiCl4 post valve closed
4/2/2010	11:43:53 AM	Main Vac valve closed
4/2/2010	11:43:53 AM	Bypass valve closed
4/2/2010	11:43:53 AM	Bubbler valve closed
4/2/2010	11:43:53 AM	Helium MFC set to  0.000000
4/2/2010	11:43:53 AM	H2 MFC set to  0.000000
4/2/2010	11:43:53 AM	BCl3 MFC set to  0.000000
4/2/2010	11:43:53 AM	SiCl4 MFC set to  0.000000
4/2/2010	11:43:53 AM	Bypass solenoid MFC set to  0.000000
4/2/2010	11:43:53 AM	Tube furnace set to 0
4/2/2010	11:43:53 AM	Run finished at 11:43 AM
4/2/2010	12:23:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	12:23:03 PM	Recipe started at 12:23 PM
4/2/2010	12:23:03 PM	Helium valve closed
4/2/2010	12:23:03 PM	H2 valve closed
4/2/2010	12:23:03 PM	BCl3 valve closed
4/2/2010	12:23:03 PM	PH3 valve closed
4/2/2010	12:23:03 PM	SiCl4 pre valve closed
4/2/2010	12:23:03 PM	SiCl4 post valve closed
4/2/2010	12:23:03 PM	Main Vac valve closed
4/2/2010	12:23:03 PM	Bubbler valve closed
4/2/2010	12:23:03 PM	Bypass valve opened
4/2/2010	12:23:03 PM	Helium MFC set to  0.000000
4/2/2010	12:23:03 PM	H2 MFC set to  0.000000
4/2/2010	12:23:03 PM	BCl3 MFC set to  0.000000
4/2/2010	12:23:03 PM	SiCl4 MFC set to  0.000000
4/2/2010	12:23:03 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	12:23:03 PM	Tube furnace set to 0
4/2/2010	12:23:34 PM	Helium valve closed
4/2/2010	12:23:34 PM	H2 valve closed
4/2/2010	12:23:34 PM	BCl3 valve closed
4/2/2010	12:23:34 PM	PH3 valve closed
4/2/2010	12:23:34 PM	SiCl4 pre valve closed
4/2/2010	12:23:34 PM	SiCl4 post valve closed
4/2/2010	12:23:34 PM	Bubbler valve closed
4/2/2010	12:23:34 PM	Main Vac valve opened
4/2/2010	12:23:34 PM	Bypass valve opened
4/2/2010	12:23:34 PM	Helium MFC set to  0.000000
4/2/2010	12:23:34 PM	H2 MFC set to  0.000000
4/2/2010	12:23:34 PM	BCl3 MFC set to  0.000000
4/2/2010	12:23:34 PM	SiCl4 MFC set to  0.000000
4/2/2010	12:23:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	12:23:34 PM	Tube furnace set to 0
4/2/2010	12:23:35 PM	Run finished at 12:23 PM
4/2/2010	12:23:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	2:57:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	2:57:31 PM	Recipe started at 2:57 PM
4/2/2010	2:57:31 PM	H2 valve closed
4/2/2010	2:57:31 PM	BCl3 valve closed
4/2/2010	2:57:31 PM	PH3 valve closed
4/2/2010	2:57:31 PM	SiCl4 pre valve closed
4/2/2010	2:57:31 PM	SiCl4 post valve closed
4/2/2010	2:57:31 PM	Main Vac valve closed
4/2/2010	2:57:31 PM	Bypass valve closed
4/2/2010	2:57:31 PM	Bubbler valve closed
4/2/2010	2:57:31 PM	Helium valve opened
4/2/2010	2:57:31 PM	Helium MFC set to  500.000000
4/2/2010	2:57:31 PM	H2 MFC set to  0.000000
4/2/2010	2:57:31 PM	BCl3 MFC set to  0.000000
4/2/2010	2:57:31 PM	SiCl4 MFC set to  0.000000
4/2/2010	2:57:31 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	2:57:31 PM	Tube furnace set to 0
4/2/2010	2:58:30 PM	Helium valve closed
4/2/2010	2:58:30 PM	H2 valve closed
4/2/2010	2:58:30 PM	BCl3 valve closed
4/2/2010	2:58:30 PM	PH3 valve closed
4/2/2010	2:58:30 PM	SiCl4 pre valve closed
4/2/2010	2:58:30 PM	SiCl4 post valve closed
4/2/2010	2:58:30 PM	Main Vac valve closed
4/2/2010	2:58:30 PM	Bypass valve closed
4/2/2010	2:58:30 PM	Bubbler valve closed
4/2/2010	2:58:30 PM	Helium MFC set to  0.000000
4/2/2010	2:58:30 PM	H2 MFC set to  0.000000
4/2/2010	2:58:30 PM	BCl3 MFC set to  0.000000
4/2/2010	2:58:30 PM	SiCl4 MFC set to  0.000000
4/2/2010	2:58:30 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	2:58:31 PM	Tube furnace set to 0
4/2/2010	2:58:31 PM	Run finished at 2:58 PM
4/2/2010	2:58:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	3:05:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	3:05:59 PM	Recipe started at 3:05 PM
4/2/2010	3:05:59 PM	Helium valve closed
4/2/2010	3:05:59 PM	H2 valve closed
4/2/2010	3:05:59 PM	BCl3 valve closed
4/2/2010	3:05:59 PM	PH3 valve closed
4/2/2010	3:05:59 PM	SiCl4 pre valve closed
4/2/2010	3:05:59 PM	SiCl4 post valve closed
4/2/2010	3:05:59 PM	Main Vac valve closed
4/2/2010	3:05:59 PM	Bubbler valve closed
4/2/2010	3:05:59 PM	Bypass valve opened
4/2/2010	3:05:59 PM	Helium MFC set to  0.000000
4/2/2010	3:05:59 PM	H2 MFC set to  0.000000
4/2/2010	3:05:59 PM	BCl3 MFC set to  0.000000
4/2/2010	3:05:59 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:05:59 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:05:59 PM	Tube furnace set to 0
4/2/2010	3:06:31 PM	Helium valve closed
4/2/2010	3:06:31 PM	H2 valve closed
4/2/2010	3:06:31 PM	BCl3 valve closed
4/2/2010	3:06:31 PM	PH3 valve closed
4/2/2010	3:06:31 PM	SiCl4 pre valve closed
4/2/2010	3:06:31 PM	SiCl4 post valve closed
4/2/2010	3:06:31 PM	Bubbler valve closed
4/2/2010	3:06:31 PM	Main Vac valve opened
4/2/2010	3:06:31 PM	Bypass valve opened
4/2/2010	3:06:31 PM	Helium MFC set to  0.000000
4/2/2010	3:06:31 PM	H2 MFC set to  0.000000
4/2/2010	3:06:31 PM	BCl3 MFC set to  0.000000
4/2/2010	3:06:31 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:06:31 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:06:31 PM	Tube furnace set to 0
4/2/2010	3:06:31 PM	Run finished at 3:06 PM
4/2/2010	3:06:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	3:09:19 PM	Helium MFC set to  100.000000
4/2/2010	3:09:21 PM	Helium valve opened
4/2/2010	3:10:04 PM	Helium valve closed
4/2/2010	3:10:51 PM	Main Vac valve closed
4/2/2010	3:10:52 PM	Bypass valve closed
4/2/2010	3:11:10 PM	Bypass valve opened
4/2/2010	3:11:11 PM	Main Vac valve opened
4/2/2010	3:11:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	3:11:19 PM	Recipe started at 3:11 PM
4/2/2010	3:11:19 PM	H2 valve closed
4/2/2010	3:11:19 PM	BCl3 valve closed
4/2/2010	3:11:19 PM	PH3 valve closed
4/2/2010	3:11:19 PM	SiCl4 pre valve closed
4/2/2010	3:11:19 PM	SiCl4 post valve closed
4/2/2010	3:11:19 PM	Main Vac valve closed
4/2/2010	3:11:19 PM	Bypass valve closed
4/2/2010	3:11:19 PM	Bubbler valve closed
4/2/2010	3:11:19 PM	Helium valve opened
4/2/2010	3:11:19 PM	Helium MFC set to  500.000000
4/2/2010	3:11:19 PM	H2 MFC set to  0.000000
4/2/2010	3:11:19 PM	BCl3 MFC set to  0.000000
4/2/2010	3:11:19 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:11:19 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:11:19 PM	Tube furnace set to 0
4/2/2010	3:12:27 PM	Helium valve closed
4/2/2010	3:12:27 PM	H2 valve closed
4/2/2010	3:12:27 PM	BCl3 valve closed
4/2/2010	3:12:27 PM	PH3 valve closed
4/2/2010	3:12:27 PM	SiCl4 pre valve closed
4/2/2010	3:12:27 PM	SiCl4 post valve closed
4/2/2010	3:12:27 PM	Main Vac valve closed
4/2/2010	3:12:27 PM	Bypass valve closed
4/2/2010	3:12:27 PM	Bubbler valve closed
4/2/2010	3:12:27 PM	Helium MFC set to  0.000000
4/2/2010	3:12:27 PM	H2 MFC set to  0.000000
4/2/2010	3:12:27 PM	BCl3 MFC set to  0.000000
4/2/2010	3:12:27 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:12:27 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:12:27 PM	Tube furnace set to 0
4/2/2010	3:12:28 PM	Run finished at 3:12 PM
4/2/2010	3:12:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	3:18:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	3:18:42 PM	Recipe started at 3:18 PM
4/2/2010	3:18:42 PM	Helium valve closed
4/2/2010	3:18:42 PM	H2 valve closed
4/2/2010	3:18:42 PM	BCl3 valve closed
4/2/2010	3:18:42 PM	PH3 valve closed
4/2/2010	3:18:42 PM	SiCl4 pre valve closed
4/2/2010	3:18:42 PM	SiCl4 post valve closed
4/2/2010	3:18:42 PM	Main Vac valve closed
4/2/2010	3:18:42 PM	Bubbler valve closed
4/2/2010	3:18:42 PM	Bypass valve opened
4/2/2010	3:18:42 PM	Helium MFC set to  0.000000
4/2/2010	3:18:42 PM	H2 MFC set to  0.000000
4/2/2010	3:18:42 PM	BCl3 MFC set to  0.000000
4/2/2010	3:18:42 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:18:42 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:18:42 PM	Tube furnace set to 0
4/2/2010	3:19:14 PM	Helium valve closed
4/2/2010	3:19:14 PM	H2 valve closed
4/2/2010	3:19:14 PM	BCl3 valve closed
4/2/2010	3:19:14 PM	PH3 valve closed
4/2/2010	3:19:14 PM	SiCl4 pre valve closed
4/2/2010	3:19:14 PM	SiCl4 post valve closed
4/2/2010	3:19:14 PM	Bubbler valve closed
4/2/2010	3:19:14 PM	Main Vac valve opened
4/2/2010	3:19:14 PM	Bypass valve opened
4/2/2010	3:19:14 PM	Helium MFC set to  0.000000
4/2/2010	3:19:14 PM	H2 MFC set to  0.000000
4/2/2010	3:19:14 PM	BCl3 MFC set to  0.000000
4/2/2010	3:19:14 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:19:14 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:19:14 PM	Tube furnace set to 0
4/2/2010	3:19:14 PM	Run finished at 3:19 PM
4/2/2010	3:19:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	3:22:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	3:22:40 PM	Recipe started at 3:22 PM
4/2/2010	3:22:40 PM	H2 valve closed
4/2/2010	3:22:40 PM	BCl3 valve closed
4/2/2010	3:22:40 PM	PH3 valve closed
4/2/2010	3:22:40 PM	SiCl4 pre valve closed
4/2/2010	3:22:40 PM	SiCl4 post valve closed
4/2/2010	3:22:40 PM	Main Vac valve closed
4/2/2010	3:22:40 PM	Bypass valve closed
4/2/2010	3:22:40 PM	Bubbler valve closed
4/2/2010	3:22:40 PM	Helium valve opened
4/2/2010	3:22:40 PM	Helium MFC set to  500.000000
4/2/2010	3:22:40 PM	H2 MFC set to  0.000000
4/2/2010	3:22:40 PM	BCl3 MFC set to  0.000000
4/2/2010	3:22:40 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:22:40 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:22:41 PM	Tube furnace set to 0
4/2/2010	3:23:47 PM	Run aborted at 3:23 PM
4/2/2010	3:23:47 PM	Helium valve closed
4/2/2010	3:23:47 PM	H2 valve closed
4/2/2010	3:23:47 PM	BCl3 valve closed
4/2/2010	3:23:47 PM	PH3 valve closed
4/2/2010	3:23:47 PM	SiCl4 pre valve closed
4/2/2010	3:23:47 PM	SiCl4 post valve closed
4/2/2010	3:23:47 PM	Bypass valve closed
4/2/2010	3:23:47 PM	Main Vac valve closed
4/2/2010	3:23:47 PM	Bubbler valve closed
4/2/2010	3:23:47 PM	Helium MFC set to  0.000000
4/2/2010	3:23:47 PM	H2 MFC set to  0.000000
4/2/2010	3:23:47 PM	BCl3 MFC set to  0.000000
4/2/2010	3:23:47 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:23:47 PM	Tube furnace set to 0
4/2/2010	3:23:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	3:23:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	3:23:50 PM	Recipe started at 3:23 PM
4/2/2010	3:23:50 PM	Helium valve closed
4/2/2010	3:23:50 PM	H2 valve closed
4/2/2010	3:23:50 PM	BCl3 valve closed
4/2/2010	3:23:50 PM	PH3 valve closed
4/2/2010	3:23:50 PM	SiCl4 pre valve closed
4/2/2010	3:23:50 PM	SiCl4 post valve closed
4/2/2010	3:23:50 PM	Main Vac valve closed
4/2/2010	3:23:50 PM	Bubbler valve closed
4/2/2010	3:23:50 PM	Bypass valve opened
4/2/2010	3:23:50 PM	Helium MFC set to  0.000000
4/2/2010	3:23:50 PM	H2 MFC set to  0.000000
4/2/2010	3:23:50 PM	BCl3 MFC set to  0.000000
4/2/2010	3:23:50 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:23:50 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:23:50 PM	Tube furnace set to 0
4/2/2010	3:24:11 PM	Helium valve closed
4/2/2010	3:24:11 PM	H2 valve closed
4/2/2010	3:24:11 PM	BCl3 valve closed
4/2/2010	3:24:11 PM	PH3 valve closed
4/2/2010	3:24:11 PM	SiCl4 pre valve closed
4/2/2010	3:24:11 PM	SiCl4 post valve closed
4/2/2010	3:24:11 PM	Bubbler valve closed
4/2/2010	3:24:11 PM	Main Vac valve opened
4/2/2010	3:24:11 PM	Bypass valve opened
4/2/2010	3:24:11 PM	Helium MFC set to  0.000000
4/2/2010	3:24:11 PM	H2 MFC set to  0.000000
4/2/2010	3:24:11 PM	BCl3 MFC set to  0.000000
4/2/2010	3:24:11 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:24:11 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:24:11 PM	Tube furnace set to 0
4/2/2010	3:24:12 PM	Run finished at 3:24 PM
4/2/2010	3:24:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	3:27:25 PM	Main Vac valve closed
4/2/2010	3:27:25 PM	Bypass valve closed
4/2/2010	3:27:41 PM	Main Vac valve opened
4/2/2010	3:27:42 PM	Bypass valve opened
4/2/2010	3:43:13 PM	Recipe started at 3:43 PM
4/2/2010	3:43:13 PM	Helium valve closed
4/2/2010	3:43:13 PM	BCl3 valve closed
4/2/2010	3:43:13 PM	PH3 valve closed
4/2/2010	3:43:13 PM	SiCl4 pre valve closed
4/2/2010	3:43:13 PM	SiCl4 post valve closed
4/2/2010	3:43:13 PM	Main Vac valve closed
4/2/2010	3:43:13 PM	Bypass valve closed
4/2/2010	3:43:13 PM	Bubbler valve closed
4/2/2010	3:43:13 PM	H2 valve opened
4/2/2010	3:43:13 PM	Helium MFC set to  0.000000
4/2/2010	3:43:13 PM	H2 MFC set to  500.000000
4/2/2010	3:43:13 PM	BCl3 MFC set to  0.000000
4/2/2010	3:43:13 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:43:13 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:43:13 PM	Tube furnace set to 1000
4/2/2010	3:44:34 PM	Helium valve closed
4/2/2010	3:44:34 PM	BCl3 valve closed
4/2/2010	3:44:34 PM	PH3 valve closed
4/2/2010	3:44:34 PM	SiCl4 pre valve closed
4/2/2010	3:44:34 PM	SiCl4 post valve closed
4/2/2010	3:44:34 PM	Main Vac valve closed
4/2/2010	3:44:34 PM	Bypass valve closed
4/2/2010	3:44:34 PM	H2 valve opened
4/2/2010	3:44:34 PM	Bubbler valve opened
4/2/2010	3:44:34 PM	Helium MFC set to  0.000000
4/2/2010	3:44:34 PM	H2 MFC set to  500.000000
4/2/2010	3:44:34 PM	BCl3 MFC set to  0.000000
4/2/2010	3:44:34 PM	SiCl4 MFC set to  0.000000
4/2/2010	3:44:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	3:44:34 PM	Tube furnace set to 1000
4/2/2010	4:04:34 PM	Helium valve closed
4/2/2010	4:04:34 PM	PH3 valve closed
4/2/2010	4:04:34 PM	Main Vac valve closed
4/2/2010	4:04:34 PM	Bypass valve closed
4/2/2010	4:04:34 PM	H2 valve opened
4/2/2010	4:04:34 PM	BCl3 valve opened
4/2/2010	4:04:34 PM	SiCl4 pre valve opened
4/2/2010	4:04:34 PM	SiCl4 post valve opened
4/2/2010	4:04:34 PM	Bubbler valve opened
4/2/2010	4:04:34 PM	Helium MFC set to  0.000000
4/2/2010	4:04:34 PM	H2 MFC set to  500.000000
4/2/2010	4:04:34 PM	BCl3 MFC set to  35.000000
4/2/2010	4:04:34 PM	SiCl4 MFC set to  325.000000
4/2/2010	4:04:34 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	4:04:35 PM	Tube furnace set to 1000
4/2/2010	4:19:35 PM	Helium valve closed
4/2/2010	4:19:35 PM	BCl3 valve closed
4/2/2010	4:19:35 PM	PH3 valve closed
4/2/2010	4:19:35 PM	SiCl4 pre valve closed
4/2/2010	4:19:35 PM	SiCl4 post valve closed
4/2/2010	4:19:35 PM	Main Vac valve closed
4/2/2010	4:19:35 PM	Bypass valve closed
4/2/2010	4:19:35 PM	H2 valve opened
4/2/2010	4:19:35 PM	Bubbler valve opened
4/2/2010	4:19:35 PM	Helium MFC set to  0.000000
4/2/2010	4:19:35 PM	H2 MFC set to  500.000000
4/2/2010	4:19:35 PM	BCl3 MFC set to  0.000000
4/2/2010	4:19:35 PM	SiCl4 MFC set to  0.000000
4/2/2010	4:19:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	4:19:35 PM	Tube furnace set to 750
4/2/2010	4:39:35 PM	H2 valve closed
4/2/2010	4:39:35 PM	BCl3 valve closed
4/2/2010	4:39:35 PM	PH3 valve closed
4/2/2010	4:39:35 PM	SiCl4 pre valve closed
4/2/2010	4:39:35 PM	SiCl4 post valve closed
4/2/2010	4:39:35 PM	Main Vac valve closed
4/2/2010	4:39:35 PM	Bypass valve closed
4/2/2010	4:39:35 PM	Helium valve opened
4/2/2010	4:39:35 PM	Bubbler valve opened
4/2/2010	4:39:35 PM	Helium MFC set to  500.000000
4/2/2010	4:39:35 PM	H2 MFC set to  0.000000
4/2/2010	4:39:35 PM	BCl3 MFC set to  0.000000
4/2/2010	4:39:35 PM	SiCl4 MFC set to  0.000000
4/2/2010	4:39:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	4:39:35 PM	Tube furnace set to 0
4/2/2010	4:59:35 PM	Helium valve closed
4/2/2010	4:59:35 PM	H2 valve closed
4/2/2010	4:59:35 PM	BCl3 valve closed
4/2/2010	4:59:35 PM	PH3 valve closed
4/2/2010	4:59:35 PM	SiCl4 pre valve closed
4/2/2010	4:59:35 PM	SiCl4 post valve closed
4/2/2010	4:59:35 PM	Main Vac valve closed
4/2/2010	4:59:35 PM	Bypass valve closed
4/2/2010	4:59:35 PM	Bubbler valve closed
4/2/2010	4:59:35 PM	Helium MFC set to  0.000000
4/2/2010	4:59:35 PM	H2 MFC set to  0.000000
4/2/2010	4:59:35 PM	BCl3 MFC set to  0.000000
4/2/2010	4:59:35 PM	SiCl4 MFC set to  0.000000
4/2/2010	4:59:35 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	4:59:35 PM	Tube furnace set to 0
4/2/2010	4:59:35 PM	Run finished at 4:59 PM
4/2/2010	5:05:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	5:05:26 PM	Recipe started at 5:05 PM
4/2/2010	5:05:26 PM	H2 valve closed
4/2/2010	5:05:26 PM	BCl3 valve closed
4/2/2010	5:05:26 PM	PH3 valve closed
4/2/2010	5:05:26 PM	SiCl4 pre valve closed
4/2/2010	5:05:26 PM	SiCl4 post valve closed
4/2/2010	5:05:26 PM	Main Vac valve closed
4/2/2010	5:05:26 PM	Bypass valve closed
4/2/2010	5:05:26 PM	Bubbler valve closed
4/2/2010	5:05:26 PM	Helium valve opened
4/2/2010	5:05:26 PM	Helium MFC set to  500.000000
4/2/2010	5:05:26 PM	H2 MFC set to  0.000000
4/2/2010	5:05:26 PM	BCl3 MFC set to  0.000000
4/2/2010	5:05:26 PM	SiCl4 MFC set to  0.000000
4/2/2010	5:05:26 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	5:05:26 PM	Tube furnace set to 0
4/2/2010	5:05:26 PM	Helium valve closed
4/2/2010	5:05:26 PM	H2 valve closed
4/2/2010	5:05:26 PM	BCl3 valve closed
4/2/2010	5:05:26 PM	PH3 valve closed
4/2/2010	5:05:26 PM	SiCl4 pre valve closed
4/2/2010	5:05:26 PM	SiCl4 post valve closed
4/2/2010	5:05:26 PM	Main Vac valve closed
4/2/2010	5:05:26 PM	Bypass valve closed
4/2/2010	5:05:26 PM	Bubbler valve closed
4/2/2010	5:05:26 PM	Helium MFC set to  0.000000
4/2/2010	5:05:26 PM	H2 MFC set to  0.000000
4/2/2010	5:05:26 PM	BCl3 MFC set to  0.000000
4/2/2010	5:05:26 PM	SiCl4 MFC set to  0.000000
4/2/2010	5:05:26 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	5:05:26 PM	Tube furnace set to 0
4/2/2010	5:05:27 PM	Run finished at 5:05 PM
4/2/2010	5:05:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/2/2010	5:10:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/2/2010	5:10:22 PM	Recipe started at 5:10 PM
4/2/2010	5:10:22 PM	Helium valve closed
4/2/2010	5:10:22 PM	H2 valve closed
4/2/2010	5:10:22 PM	BCl3 valve closed
4/2/2010	5:10:22 PM	PH3 valve closed
4/2/2010	5:10:22 PM	SiCl4 pre valve closed
4/2/2010	5:10:22 PM	SiCl4 post valve closed
4/2/2010	5:10:22 PM	Main Vac valve closed
4/2/2010	5:10:22 PM	Bubbler valve closed
4/2/2010	5:10:22 PM	Bypass valve opened
4/2/2010	5:10:22 PM	Helium MFC set to  0.000000
4/2/2010	5:10:22 PM	H2 MFC set to  0.000000
4/2/2010	5:10:22 PM	BCl3 MFC set to  0.000000
4/2/2010	5:10:22 PM	SiCl4 MFC set to  0.000000
4/2/2010	5:10:22 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	5:10:22 PM	Tube furnace set to 0
4/2/2010	5:10:52 PM	Helium valve closed
4/2/2010	5:10:52 PM	H2 valve closed
4/2/2010	5:10:52 PM	BCl3 valve closed
4/2/2010	5:10:52 PM	PH3 valve closed
4/2/2010	5:10:52 PM	SiCl4 pre valve closed
4/2/2010	5:10:52 PM	SiCl4 post valve closed
4/2/2010	5:10:52 PM	Bubbler valve closed
4/2/2010	5:10:52 PM	Main Vac valve opened
4/2/2010	5:10:52 PM	Bypass valve opened
4/2/2010	5:10:52 PM	Helium MFC set to  0.000000
4/2/2010	5:10:52 PM	H2 MFC set to  0.000000
4/2/2010	5:10:52 PM	BCl3 MFC set to  0.000000
4/2/2010	5:10:52 PM	SiCl4 MFC set to  0.000000
4/2/2010	5:10:52 PM	Bypass solenoid MFC set to  0.000000
4/2/2010	5:10:52 PM	Tube furnace set to 0
4/2/2010	5:10:52 PM	Run finished at 5:10 PM
4/2/2010	5:10:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
